Semiconductor Scrubber

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Company Name:BDC Inc
Membership:Free Member
Member Since:2023. 08.18
Country/Region:Korea
City:Daejeon
Contact:Song hae Oreum
Related Keywords:semiconductor scrubber

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BDC Inc
[Korea]

Address: 291-26 Jinjamyet-ro Yuseong-gu Daejeon

Phone: 82-42-5380001

Contact name: Song hae Oreum

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Product Details

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Place of Origin: Korea
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Description

SEMICONDUCTOR SCRUBBER

BDC – Scrubber (BECO) is a device that purifies harmful gases discharged after being used in semiconductor and FPD (Flat Pannel Display) process equipment. It is a gas decomposition scrubber using plasma.

Process capability

Semiconductor process toxic gas treatment using high-temperature plasma
PFC gases (NF3, SF6, CF4, C2F6, etc.)
Corrosive gases (CI2, F2, BCI3, HBr, etc.)
Combustible gases (SiH4, TEOS, DCS, H2, etc.

Features

Reducing maintenance costs by extending the life of consumable parts
Excluding secondary heat sources (LPG, LNG, etc.) Utilization of Plasma Arc
Reduction of maintenance and utility costs through recycling of PCW
PM cycle reduction through efficient module operation
Large-capacity gas treatment using 4 chambers
High processing efficiency of PFC GAS

MODEL	DBC-BECO
Gas Process	Plasma Arc
Total Capacity	300slm for CVD
Dimension	800(W) x 800(D) x 1850(H)
Power Consumption	11 Kw for CF4 DRE 90% 8 Kw for NF3 DRE 95%
Torch lifetime	> 12 Months
Target Gases / DRE	CF4 1.0 slm > 90% at 150slm inlet flow for Dry etch NF3 3.0 slm > 95% at 300slm inlet flow for CVD
MTBF / MTTR	> 6 months / 1.5hr for full maintenance
CDA	Adjustable 3~10 SLM
PCW	Adjustable 10~15 SLM
N2	Adjustable 20~100 SLM
Intel Numbers	NW50- 4 inlets (※ Optional : NW50- 2inlets)

○ DRE for PFC gases
CF4 > 90%
SF6 > 90%
NF3 > 95%
All other PFC gases treated with DRE>90%

○ Toxics gas emissions
HF, HCl, BCl3, HBr, SiF4 …< TLV and IDLH
Sub-TLV emissions achieved with chemical dosing (option)

○ N2O abatement: DRE>90%

○ Treatment capacity (per plasma torch):
Up to 150slm for CF4-containing gas streams
Up to 300slm for NF3-containing gas streams

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